微型定位平台
直线电机和丝杠驱动平台
parker MX80L系列微型直线电机定位平台，具有体积小，重量轻，精度高，速度快，搭建简单，可组成多维系统等优点。
主要指标概要：
行程：25－150毫米
分辨率：10纳米至5微米
重复定位精度0.04微米－10微米
定位精度：4微米－14微米
速度：30毫米每秒－2米每秒
加速度：5g

Miniature Positioners
linear motor and screw driven stages

Miniaturization of fiber optics, photonics, electronics and biomedical
processes has driven the need for smaller and more efficient
positioners. Parker offers numerous miniature stage solutions.
Features
• Miniature size
• 5 g acceleration
• Fast settling
• Submicron precision
• High velocity (2 m/sec.)
• Multi-axis platform
Attributes
• Low profile miniature size - (25 mm high X 80 mm wide)
• Linear servo motor drive
• Six linear encoder resolutions (0.01 μm to 5.0 μm)
• 25, 50, 100, 150 and 200 mm travels
• Cross Roller bearing (zero cage creep design)
• Precision or standard grade
• Cleanroom and low ESD options
• Fully adjustable home and limit sensors
• Dowel holes for repeatable mounting of payload
• Master reference surface to travel path
• “Plug-in” intelligent drive
• Pneumatic z-axis counterbalance
• No moving cables
MX80L Features
Miniaturization of fiber optics, photonics, electronics and biomedical processes has driven the need for smaller and more efficient positioners. Parker’s MX80 miniature stage, the smallest linear servomotor driven positioner in the industry, is loaded with high-performance features for both rapid linear translation and precise positioning of lighter loads in small work envelopes. Designed for today’s 24/7 production demands, the MX80 has redefined “high-throughput automation” in the world of miniature positioners.